MICROSYSTEM TECHNOLOGIES


Please sign in to view the rest of this entry.

MICROSYSTEM TECHNOLOGIES
1010600MICROSYSTEM TECHNOLOGIES
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis> The use of silicon technologies for sensor fabrication allows in a variety of applications the integration of electronic circuits together with the sensing element on one chip, resulting in complex microsystems. Besides lowering manufacturing costs for high-volume production, the silicon integration of both sensors and electronics offers several significant advantages, such as small size and low weight, close physical proxim…
Citation
Sabrie Soloman: Sensors Handbook, Second Edition. MICROSYSTEM TECHNOLOGIES, Chapter (McGraw-Hill Professional, 2010 1999), AccessEngineering Export