ADVANCES IN SURFACE MICROMACHINED FORCE SENSORS


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ADVANCES IN SURFACE MICROMACHINED FORCE SENSORS
1010600ADVANCES IN SURFACE MICROMACHINED FORCE SENSORS
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis> Surface micromachining of polysilicon devices on a single crystal silicon substrate is maturing as evidenced by, for instance, the commercial exploitation of polysilicon pressure transducers. This pressure transducer technology is based in part on the batch fabrication of vacuum-sealed pill boxes. Pill boxes, which contain mechanically resonant structures, produce devices for whi…
Citation
Sabrie Soloman: Sensors Handbook, Second Edition. ADVANCES IN SURFACE MICROMACHINED FORCE SENSORS, Chapter (McGraw-Hill Professional, 2010 1999), AccessEngineering Export