SILICON MICROSTRUCTURES


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SILICON MICROSTRUCTURES
1010600SILICON MICROSTRUCTURES
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis> In a very real sense, the technology behind silicon sensing chips is derived from integrated circuit fabrication methods. At the same time, the widespread success and commercialization of high-volume silicon sensors since 1980 has inspired a new technology based on silicon sensor fabrication methods. While silicon sensors detect and measure external environmental parameters, new classes of silicon microstructures and microactu…
Citation
Sabrie Soloman: Sensors Handbook, Second Edition. SILICON MICROSTRUCTURES, Chapter (McGraw-Hill Professional, 2010 1999), AccessEngineering Export