ADVANCED SENSOR DESIGNS


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ADVANCED SENSOR DESIGNS
1010600ADVANCED SENSOR DESIGNS
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis> Silicon pressure sensors similar to those described thus far have been in production for nearly two decades. With the help of the latest techniques in silicon micromachining as well as those of established integrated circuit manufacturing methods, remarkable improvements in performance, sophistication, functionality, size, and cost can be delivered. This chapter describes in detail several different chips manufactured with adv…
Citation
Sabrie Soloman: Sensors Handbook, Second Edition. ADVANCED SENSOR DESIGNS, Chapter (McGraw-Hill Professional, 2010 1999), AccessEngineering Export