UNIVERSAL SENSORS TECHNOLOGY: BASIC CHARACTERISTICS OF SILICON PRESSURE SENSORS


Please sign in to view the rest of this entry.

UNIVERSAL SENSORS TECHNOLOGY: BASIC CHARACTERISTICS OF SILICON PRESSURE SENSORS
1010600UNIVERSAL SENSORS TECHNOLOGY: BASIC CHARACTERISTICS OF SILICON PRESSURE SENSORS
<emphasis role="italic"><emphasis role="bold">SILICON PIEZORESISTIVE PRESSURE SENSORS</emphasis></emphasis> Silicon pressure sensors are by a wide margin the most successful commercial implementation of solid-state mechanical sensors or silicon micromachined structures. In fact, silicon micromachining initially evolved largely as a tool for the creation of such sensors.
Citation
Sabrie Soloman: Sensors Handbook, Second Edition. UNIVERSAL SENSORS TECHNOLOGY: BASIC CHARACTERISTICS OF SILICON PRESSURE SENSORS, Chapter (McGraw-Hill Professional, 2010 1999), AccessEngineering Export