A TWO-CHIP APPROACH TO SMART SENSING


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A TWO-CHIP APPROACH TO SMART SENSING
1010600A TWO-CHIP APPROACH TO SMART SENSING
<emphasis role="italic"><emphasis role="bold">BACKGROUND</emphasis></emphasis> Great advances have taken place over the past few years in silicon micromachining technology that have enabled new classes of sensors to be produced. In addition, sensors can now be produced at costs low enough for new applications to emerge. Many of the new products that have been reported have incorporated new silicon micromachining processes and new sensing mechanisms. However, most sensor suppliers …
Citation
Sabrie Soloman: Sensors Handbook, Second Edition. A TWO-CHIP APPROACH TO SMART SENSING, Chapter (McGraw-Hill Professional, 2010 1999), AccessEngineering Export