MICROFABRICATED SOLID-STATE SECONDARY BATTERIES FOR MICROSENSORS


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MICROFABRICATED SOLID-STATE SECONDARY BATTERIES FOR MICROSENSORS
1010600MICROFABRICATED SOLID-STATE SECONDARY BATTERIES FOR MICROSENSORS
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis> A thin-film solid-state Li/TiS 2 microbattery has been developed at Eveready Battery Company (EBC). It is fabricated using sputtering for deposition of the metal contacts, a TiS 2 cathode, and an oxide-sulfide glassy electrolyte. High-vacuum evaporation is used to deposit a LiI layer and Li anode. EBC…
Citation
Sabrie Soloman: Sensors Handbook, Second Edition. MICROFABRICATED SOLID-STATE SECONDARY BATTERIES FOR MICROSENSORS, Chapter (McGraw-Hill Professional, 2010 1999), AccessEngineering Export