MEASURING TECHNIQUES IN MEMS—NANO-MEMS & GENOME SEQUENCING APPLICATIONS


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MEASURING TECHNIQUES IN MEMS—NANO-MEMS & GENOME SEQUENCING APPLICATIONS
10101031010600MEASURING TECHNIQUES IN MEMS—NANO-MEMS & GENOME SEQUENCING APPLICATIONS
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis> Recent Nano-MEMS developments are the major contributor to rapid growth of commercially viable products in the market every year. Nano-MEMS success is strengthened as a result of the development of fast and accurate 3D imaging and metrology in several fields, extended even to huma…
Citation
Sabrie Soloman: Sensors Handbook, Second Edition. MEASURING TECHNIQUES IN MEMS—NANO-MEMS & GENOME SEQUENCING APPLICATIONS, Chapter (McGraw-Hill Professional, 2010 1999), AccessEngineering Export