FUNCTIONAL INTEGRATION OF MICROSYSTEMS IN SILICON


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FUNCTIONAL INTEGRATION OF MICROSYSTEMS IN SILICON
1010600FUNCTIONAL INTEGRATION OF MICROSYSTEMS IN SILICON
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis> Research on Microsystems at the Delft University of technology is aiming at the fabrication of devices in silicon at the highest level of functional integration (i.e., the ultimate solution would be a device with all the components of the data acquisition unit integrated on the chip). However, the desirable level of functional integration depends on the application. Usually, …
Citation
Sabrie Soloman: Sensors Handbook, Second Edition. FUNCTIONAL INTEGRATION OF MICROSYSTEMS IN SILICON, Chapter (McGraw-Hill Professional, 2010 1999), AccessEngineering Export