MEMS ADVANCED RESEARCH AND DEVELOPMENT


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MEMS ADVANCED RESEARCH AND DEVELOPMENT
1010600MEMS ADVANCED RESEARCH AND DEVELOPMENT
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis> During the 1970s and 1980s, fundamental and influential research in micromachining was conducted at Stanford University in fields ranging from pressure sensors to accelerometers to gas chromatography. The world’s first silicon accelerometer, demonstrated by Roylance and Angell,
Citation
Sabrie Soloman: Sensors Handbook, Second Edition. MEMS ADVANCED RESEARCH AND DEVELOPMENT, Chapter (McGraw-Hill Professional, 2010 1999), AccessEngineering Export