MEMS: CURRENT AND FUTURE TECHNOLOGY?


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MEMS: CURRENT AND FUTURE TECHNOLOGY?
1010600MEMS: CURRENT AND FUTURE TECHNOLOGY?
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis> In the past thirty years, significant research, development, and money has been invested in microelectromechanical systems (MEMS) or micromachines. The technology has important applications, but we have yet to see major success stories and market breakthroughs. In this chapter, we will explain the obstacles to rapid MEMS growth and suggest ways to circumvent them.
Citation
Sabrie Soloman: Sensors Handbook, Second Edition. MEMS: CURRENT AND FUTURE TECHNOLOGY?, Chapter (McGraw-Hill Professional, 2010 1999), AccessEngineering Export