AIRBORNE MOLECULAR CONTAMINATION


Please sign in to view the rest of this entry.

AIRBORNE MOLECULAR CONTAMINATION
Chris Muller Purafil, Inc. Doraville, Georgia 10306001010608AIRBORNE MOLECULAR CONTAMINATION
<emphasis role="italic"><emphasis role="bold">INTRODUCTION TO CHEMICAL CONTAMINATION AND DEFINITION OF AMC</emphasis></emphasis> The term airborne molecular contamination (AMC) covers a wide ran…
Citation
Hwaiyu Geng: Semiconductor Manufacturing Handbook. AIRBORNE MOLECULAR CONTAMINATION, Chapter (McGraw-Hill Professional, 2005), AccessEngineering Export