ESD CONTROLS IN CLEANROOM ENVIRONMENTS


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ESD CONTROLS IN CLEANROOM ENVIRONMENTS
Larry Levit ION Systems, Inc. Berkeley, California 10306001010608ESD CONTROLS IN CLEANROOM ENVIRONMENTS
<emphasis role="italic"><emphasis role="bold">ELECTROSTATIC CHARGE IN SEMICONDUCTOR CLEANROOMS</emphasis></emphasis> Electrostatic charge grows to extremely high levels in the environment of a semiconductor fab. …
Citation
Hwaiyu Geng: Semiconductor Manufacturing Handbook. ESD CONTROLS IN CLEANROOM ENVIRONMENTS, Chapter (McGraw-Hill Professional, 2005), AccessEngineering Export