PFC ABATEMENT


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PFC ABATEMENT
James C. Cox Hitachi High Technologies America Dallas, Texas 10306001010608PFC ABATEMENT
<emphasis role="italic"><emphasis role="bold">PERFLUOROCARBON COMPOUNDS</emphasis></emphasis>
<emphasis role="bold">What Are PFCs?</emphasis>
Citation
Hwaiyu Geng: Semiconductor Manufacturing Handbook. PFC ABATEMENT, Chapter (McGraw-Hill Professional, 2005), AccessEngineering Export