FUNDAMENTALS OF MICROELECTROMECHANICAL SYSTEMS


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FUNDAMENTALS OF MICROELECTROMECHANICAL SYSTEMS
Michael A. Huff MEMS and Nanotechnology Exchange Reston, Virginia 10306001010608FUNDAMENTALS OF MICROELECTROMECHANICAL SYSTEMS
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis>
<emphasis role="bold">The Definition of MEMS, Microsystems Technology, an…</emphasis>
Citation
Hwaiyu Geng: Semiconductor Manufacturing Handbook. FUNDAMENTALS OF MICROELECTROMECHANICAL SYSTEMS, Chapter (McGraw-Hill Professional, 2005), AccessEngineering Export