CHEMICAL VAPOR DEPOSITION


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CHEMICAL VAPOR DEPOSITION
Edward J. McInerney Novellus Systems, Inc. San Jose, California 10306001010608CHEMICAL VAPOR DEPOSITION
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis> Chemical vapor deposition (CVD) is widely used in microelectronics fabrication to deposit thin films. It is a…
Citation
Hwaiyu Geng: Semiconductor Manufacturing Handbook. CHEMICAL VAPOR DEPOSITION, Chapter (McGraw-Hill Professional, 2005), AccessEngineering Export