PHYSICAL VAPOR DEPOSITION


Please sign in to view the rest of this entry.

PHYSICAL VAPOR DEPOSITION
Florian Solzbacher University of Utah Salt Lake City, Utah 10306001010608PHYSICAL VAPOR DEPOSITION
<emphasis role="italic"><emphasis role="bold">INTRODUCTION TO PHYSICAL VAPOR DEPOSITION</emphasis></emphasis> Physical vapor deposition (PVD) is a high-vacuum deposition process for metals, metal…
Citation
Hwaiyu Geng: Semiconductor Manufacturing Handbook. PHYSICAL VAPOR DEPOSITION, Chapter (McGraw-Hill Professional, 2005), AccessEngineering Export