PLASMA ETCHING


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PLASMA ETCHING
Shouliang Lai Unaxis USA, Inc. St. Petersburg, Florida 10306001010608PLASMA ETCHING
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis> Plasma is an assembly of ions, electrons, and neutrals in which the motion of particles is dominated by electromagnetic interaction. Plasma as a whole is electrically neutral.…
Citation
Hwaiyu Geng: Semiconductor Manufacturing Handbook. PLASMA ETCHING, Chapter (McGraw-Hill Professional, 2005), AccessEngineering Export