MICROLITHOGRAPHY


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MICROLITHOGRAPHY
Chris A. Mack KLA-Tencor Austin, Texas The fabrication of an integrated circuit (IC) requires a variety of physical and chemical processes performed on a semiconductor (e.g., silicon) substrate. In general, the various processes used to make an IC fall into three categories—film deposition, patterning, and semiconductor doping. Films of both conductors (such as polysilicon, aluminum, and more recently copper) and insulators (various forms of silicon dioxide, silicon nitride, and others) are used to connect and isolate transistors and their components. Selective doping of various regions of silicon allows the conductivity…
Citation
Hwaiyu Geng: Semiconductor Manufacturing Handbook. MICROLITHOGRAPHY, Chapter (McGraw-Hill Professional, 2005), AccessEngineering Export