Contributors


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Contributors
ContributorsMike AmeenAxcelis Technologies, Inc., Beverly, Massachusetts (Chap. 10)Hal AmickColin Gordon Associates, Brisbane, California (Chap. 47)Gautam BanerjeeVersum Materials, Inc., Tempe, Arizona (Chap. 15)Ahmed Busnaina
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. Contributors, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export