About the EditorAbout the EditorHwaiyu Geng, CMfgE, PE, is a principal at Amica Research (Palo Alto, California), promoting green engineering and manufacturing programs. He has had over 40 years of diversified engineering and management experience, working with Applied Materials, Hewlett-Packard, and Intel on international high-tech projects. He has written and presented at international conferences numerous technical papers. Mr. Geng is also the editor of McGraw-Hill's Manufacturing Engineering Handbook. He is a patent holder.
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. About the Editor, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering