REFERENCES


Please sign in to view the rest of this entry.

REFERENCES
REFERENCES M. L. Gendreau (1999, 2001), "(Specification of the) Effects of Acoustic Noise on Optical Equipment," Proceedings of the International Society for Optical Engineering (SPIE), Vol. 3786, Denver, CO (July 1999) reprinted and updated in Noise & Vibration Worldwide, Vol. 32, No. 4, Apr. 2001. M. L. Gendreau, "Generic Noise Criterion Curves for Sensitive Equipment," Proceedings of Inter-Noise 2012, New York, Aug. 19–22, 2012. J. S. Bendat and A. G. Piersol, Random Data: Analysis and Measurement Procedures, 4th ed., Wiley-I…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export