FUTURE TRENDS AND SPECIAL CASES


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FUTURE TRENDS AND SPECIAL CASES
FUTURE TRENDS AND SPECIAL CASES
Microelectronics Facilities The vibration and noise sensitivity of microelectronics production equipment has remained fairly static for almost a decade, and it appears that industry pressure will continue to push tool makers to provide equipment that will work in current environments. If production technologies are forced to shift to new hardware concepts more in tune with those used in nanotechnology—particularly if they must be used in-line in a cleanroom environment, there may be some revision of vibration and noise requirements. One trend that may affect tools is wafer size. Most current facilities are currently processing 300-mm wafers,…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FUTURE TRENDS AND SPECIAL CASES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export