PURPOSES AND TIMING OF FACILITY VIBRATION SURVEYS


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PURPOSES AND TIMING OF FACILITY VIBRATION SURVEYS
PURPOSES AND TIMING OF FACILITY VIBRATION SURVEYSIt is quite common to carry out a vibration survey of a site prior to construction of a facility. This may be just the first of several vibration evaluations carried out over the life of a fab or research facility. There are a variety of logical milestones at which these surveys may be appropriate, as discussed by Amick et al.43 These might include Fab construction process Structural evaluationThe intent of a structural evaluation is to val…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. PURPOSES AND TIMING OF FACILITY VIBRATION SURVEYS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export