TOOL HOOK-UP


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TOOL HOOK-UP
TOOL HOOK-UP
Tool Layout The location of the functional areas within a cleanroom or laboratory within the building, and with respect to vibration sources outside the building, influences the vibration and noise environment achievable in the room. Judicious layout is the most cost-effective way (and sometimes the only way) to achieve a good vibration and noise environment. For example, the most sensitive labs should be located as far as possible from internal sources of vibration and noise such as mechanical and electrical equipment, elevators, major corridors, loading docks, etc. Position with respect to external sources—such as on-site and off-site roads and central utilities buildings—should also be considered.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. TOOL HOOK-UP, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export