VIBRATION AND NOISE SOURCES


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VIBRATION AND NOISE SOURCES
VIBRATION AND NOISE SOURCES
Site Vibration Sources The vibration environments of all potential building sites for advanced technology research are limited to varying degrees by groundborne vibration from a variety of potential sources: microseismic activity, transportation, other nearby facilities containing mechanical equipment, etc.,17,18 examined the effects of locale on site vibrations, showing that proximity to developed areas also impacts the vibration environment. A site vibration survey is generall…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. VIBRATION AND NOISE SOURCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export