FURTHER READING


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FURTHER READING
FURTHER READING ASHRAE Handbook, Heating Ventilating and Air-Conditioning Applications, 2011, American Society of Heating, Refrigerating and Air–Conditioning Engineers, Inc., Atlanta, Ga. Chubb, N., John Chubb Instrumentation papers for the IEEE-IAS meeting Oct. 1999 and for the ESA meeting at Niagara Falls, Jun. 2000. International Organization for Standardization (ISO): ISO 14644 Series Cleanroom Standards. "Design for Energy Efficient Low Operating Cost Cleanrooms" by Raj Jaisinghani of Technovation Systems, Inc. ESD Association, Standard ANSI/ESD S20.20, "Development …
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FURTHER READING, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export