COMPUTATIONAL FLUID DYNAMICS


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COMPUTATIONAL FLUID DYNAMICS
COMPUTATIONAL FLUID DYNAMICSOne of the most powerful tools available for determining the optimal ventilation (recirculation, makeup air, and exhaust) for the cleanroom is computational fluid dynamic (CFD) modeling or airflow modeling (Table 46.5).Cleanroom HVAC Requirements: Recommended to Meet and Exceed FED-STD 209E, Vertical Laminar Flow, and ISO 14644-1
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. COMPUTATIONAL FLUID DYNAMICS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export