VIBRATION AND NOISE CONTROL


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VIBRATION AND NOISE CONTROL
VIBRATION AND NOISE CONTROLThe size and weight of equipment affects vibration transfer and control. Concrete "waffle" slabs under the cleanroom floor worked sufficiently well for keeping equipment vibration from transfer to other areas of production or to metrology tools. Waffle slabs remain rigid even if holes are drilled in the floor for piping and conduits access to the cleanroom. Because the strength of the floor is in the grid system, rearrangement is feasible; additional holes can be punched in the floor without adversely affecting vibration considerations. All mechanical equipment should be isolated with springs, flexible connections, and isolated foundations to minimize the vibration effect. Quiet, energy efficient fans and motors allow to maintain the desired NC (Noise Criteri…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. VIBRATION AND NOISE CONTROL, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export