PROCESS CONTAMINATION CONTROL


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PROCESS CONTAMINATION CONTROL
PROCESS CONTAMINATION CONTROL
Air Filtration Cleanroom air typically is filtered with terminal HEPA filters that provide efficiency of 99.99 percent at 0.3 to 0.5 μm, whereas ULPA filters provide efficiency of 99.999 percent at 0.12 μm. Other devices may also be required depending on cleanroom purpose, that is, HEPA filtration in recirculating and makeup air handlers, VOC absorption with charcoal type or similar synthetic filters, electrostatic filtration chambers, etc. Fan-filters are no longer new to the cleanroom market, and properly applied shall provide an excellent and economical solution for many high-level cleanrooms especially in buildi…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. PROCESS CONTAMINATION CONTROL, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export