ENVIRONMENTAL REQUIREMENTS


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ENVIRONMENTAL REQUIREMENTS
ENVIRONMENTAL REQUIREMENTSEnvironmental conditioning systems typically consist of recirculation and makeup air systems (temperature and humidity control of the cleanroom is accomplished via these systems), general exhaust, acids exhaust and scrubbing, solvents and VOC (Volatile organic compounds) exhaust and absorption, toxic gases exhaust, and destruction.A proven element in cleanroom design is the use of AMC (Airborne Molecular Contamination) control systems. These systems incorporate cleaning of outside air used for ventilation and pressurization, removing VOC and fugitive emissions from the recirculation air system, and cleaning process emissions from the exhaust stream. AMC systems are typically classified by their chemical properties: acid, base, cond…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ENVIRONMENTAL REQUIREMENTS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export