FLOOR SYSTEMS


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FLOOR SYSTEMS
FLOOR SYSTEMSFloor systems for the cleanrooms most commonly are perforated wafer concrete panels over the subfab, raised stand floor panels, or slab on grade with side air grilles. Typically these systems are provided with ESD (electrostatic discharge) or an ESD grade epoxy floor. Significant factor influencing the decision during selection of floor systems is airflow management. Where unidirectional airflow and parallelism are critical factors, the raised panel floor system or perforated wafer concrete panels over the lower floor (subfab) provide superior performance. The disadvantage of raised floor systems is relatively high cost and limited structural capability. When unidirectional airflow is not a major concern the slab on grade with sidewall air returns may perform effectively and at significa…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FLOOR SYSTEMS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export