ELEMENTS OF A CLEANROOM


Please sign in to view the rest of this entry.

ELEMENTS OF A CLEANROOM
ELEMENTS OF A CLEANROOMRegardless of configuration, cleanrooms consist of common elements required to support and protect clean manufacturing process that is housed within the cleanroom. These elements include ceiling systems with HEPA filters, walls, floor systems, and the environmental conditioning systems. See Figs. 46.6 and 46.8.
Unidirectional air as it meets obstacles.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ELEMENTS OF A CLEANROOM, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export