ELEMENTS OF A CLEANROOM ELEMENTS OF A CLEANROOMRegardless of configuration, cleanrooms consist of common elements required to support and protect clean manufacturing process that is housed within the cleanroom. These elements include ceiling systems with HEPA filters, walls, floor systems, and the environmental conditioning systems. See Figs. 46.6 and 46.8.
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ELEMENTS OF A CLEANROOM, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering