AIR CHANGES


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AIR CHANGES
AIR CHANGESThe air distribution devices in cleanrooms (usually ceiling filters) are designed to provide a uniform "shower" of cleaned, filtered air. The quantity of air supplied to the room brings to mind the analogy of a fire hydrant as opposed to an ordinary showerhead.American Federal Standard 209 E (obsolete), Japanese JIS B9920, and ISO 14644-1 entitled "Cleanrooms and associated controlled environments—Part 1: Classification of air cleanliness by particle concentration" provide guidelines for cleanroom parameters, classification, and testing, but do not tell you how to get there economically. This is because each process and, therefore, cleanroom requirements a…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. AIR CHANGES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export