AIRFLOW LAYOUTS AND PATTERNS


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AIRFLOW LAYOUTS AND PATTERNS
AIRFLOW LAYOUTS AND PATTERNSThe airflow in cleanrooms may be vertical with supply air coming from the ceiling and return air being removed through the openings in the floor, vertical with supply air coming from the ceiling and return air being removed through the openings in the sidewalls, horizontal with supply air coming from the wall, and return air being removed through the openings in the opposite wall or a combination of high and low returns.
Unidirectional Airflow When the air leaves the face of a clean HEPA filter, it travels at a uniform velocity, which allows the flow to be almost unidirectional (
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. AIRFLOW LAYOUTS AND PATTERNS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export