TYPES OF CLEANROOMS


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TYPES OF CLEANROOMS
TYPES OF CLEANROOMSToday's microelectronics facility cleanroom is a complex system whose purpose is to support and protect manufacturing processes and personnel. Cleanrooms generally constructed following basic conceptual configurations as Ballroom. Ballrooms are typically open areas with ancillary functions at the perimeter (Figs. 46.1 and 46.2). Bay and chase. Bay and chase cleanrooms are typically configured as clean "fingers" with supporting functions b…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. TYPES OF CLEANROOMS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export