CLEANROOM STANDARDS AND CLASSIFICATIONS


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CLEANROOM STANDARDS AND CLASSIFICATIONS
CLEANROOM STANDARDS AND CLASSIFICATIONSThe U.S. FED-STD 209E provided guides on cleanliness, cleanroom design, construction, and certification that was canceled and superseded by ISO 14644 standards with the following parts: Part 1 Classification of air cleanliness (Tables 46.1 and 46.2) Part 2 Monitoring cleanroom performance Part 3 Test methods Part 4 Design, construction, and start-up
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CLEANROOM STANDARDS AND CLASSIFICATIONS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export