INTRODUCTION


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INTRODUCTION
INTRODUCTIONManufacturing cleanroom is a complex organism whose purpose is to both support and protect manufacturing processes and personnel. Every cleanroom is composed of the walls, ceilings, floors, and air systems. For the purpose of this chapter, the cleanroom will be considered to be the classic cleanroom with central plant (HVAC, exhaust systems, utilities, etc.), and supporting process systems (ultra-high purity (UHP) gases, UHP water, process cooling, etc.).When developing an overall manufacturing strategy, the cleanroom shall be considered as a process element. Just as each manufacturing process associated with high-tech manufacturing shall be studied and analyzed in depth in order to optimize its function for producing the finished product, the cleanroom shall be…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. INTRODUCTION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export