REFERENCES


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REFERENCES
REFERENCES A. Sidhwa, D. Zuck, L. Bao, J. Fonshill, and M. Boomer, "Characterization of Cleaning Process via Implementation of Analytical Techniques for Aluminum Faceplate Used for SACVD and CVD Application Sematech," 2014 Surface Preparation Cleaning Conference (SPCC), Austin, TX, Apr. 22, 2014. A. Sidhwa, D. Zuck, and J. Deem, "Importance of Precision Parts Cleaning for Sub-20-nm Technology Nodes," Semiconductor Technology Symposium (STS-Conf Semicon West), San Francisco, CA, Jul. 8, 2104. A. Sidhwa, D. Zuck, J. Deem, O. Khalil, and S. Nicholas, "Implementation of Final Surface Finish" (FSF") by Using Cost-Effective Atomically Clean Surface (ACS") Process for Sub-1…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export