THE PLASMA COATING PROCESS


Please sign in to view the rest of this entry.

THE PLASMA COATING PROCESS
THE PLASMA COATING PROCESSCoatings and passivation can reduce the cost of ownership by extending the part life cycle after multiple clean process steps. Imagine if the recycled part is replaced with a new part after required chamber preventive maintenance step. Imagine the tremendous cost burden for replacing used parts with new parts after scheduled maintenance. Today, high-volume manufacturing semiconductor companies are saving millions of dollars every year by recoating and passivating part surfaces. The section below will discuss about coatings and passivation methods. Yttrium oxide–based coating mainly developed for etch chambers forms a protective layer on less noble substrates. A plasma spray tool is used to perform this coating.The plasma spray proce…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. THE PLASMA COATING PROCESS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export