PART SURFACE TREATMENT TECHNOLOGIES AND THEIR EFFECTS ON PROCESS PERFORMANCE


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PART SURFACE TREATMENT TECHNOLOGIES AND THEIR EFFECTS ON PROCESS PERFORMANCE
PART SURFACE TREATMENT TECHNOLOGIES AND THEIR EFFECTS ON PROCESS PERFORMANCEPart surface roughness and part surface composition have a direct impact on chamber particle performance in most chamber processes.
Twin Wire Arc Spray in PVD/Metal Sputter Applications Metal sputtered onto tool shielding during metal deposition and metal sputtering processes tend to build film stress quickly, which causes the films to separate from the shielding, creating high chamber particles and process failure. In the late 1970s part clean developer Walt Warner at IBM discovered that metal shielding roughened with bead blast media had vastly superior…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. PART SURFACE TREATMENT TECHNOLOGIES AND THEIR EFFECTS ON PROCESS PERFORMANCE, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export