A HISTORIC PERSPECTIVE ON OUTSOURCED PART CLEANING


Please sign in to view the rest of this entry.

A HISTORIC PERSPECTIVE ON OUTSOURCED PART CLEANING
A HISTORIC PERSPECTIVE ON OUTSOURCED PART CLEANING"Parts" are the tens of thousands of tool and chamber components, inside the thousands of process tools that become contaminated during the semiconductor manufacturing process. The process contamination results in yield loss and ultimately process failure, and the parts must all be removed and replaced by a cleaned part or replaced with a new part. Tool parts manufacturers include all major equipment original equipment manufacturers (OEMs), including Applied Materials, Lam Research, Tokyo Electron, ASML, ASM, and many others.Before the 1990s many semiconductor manufacturers performed part cleaning activities "in-house" utilizing their own equipment and personnel. As the part cleaning pro…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. A HISTORIC PERSPECTIVE ON OUTSOURCED PART CLEANING, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export