INTRODUCTION


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INTRODUCTION
INTRODUCTIONMany critical technologies rely on processes that utilize plasma-based material processing. Plasma processing is one of the cornerstone technologies for the semiconductor industry, and serves a vital role in the essential processing of material, broadly impacting other market sectors such as display technologies, energy efficient building materials, flexible electronics, bio-compatible materials and devices, and low cost photovoltaics. One of the major applications of plasmas in high-volume manufacturing is thin film growth and patterning. Electronic and optical devices require process efficient and economical manufacturing schemes for nanoscale pattern transfer down to less than 10 nm and deposition and surface activation technologies for self-organizing structures and atomic scale deposit…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. INTRODUCTION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export