FURTHER READING


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FURTHER READING
FURTHER READING Biltroft, P., Chap. 7 in Semiconductor Manufacturing Handbook, 1st ed., McGraw-Hill, New York, 2005. Harris, N. S., Modern Vacuum Practice, 3d ed., BOC Edwards, Crawley, 2004. Shearer, M., Semiconductor Industry: Wafer Fab Exhaust Management, 1st ed., CRC Press, Informa, Boca Raton, FL, 2005.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FURTHER READING, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export