CONCLUSION AND FUTURE TRENDS


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CONCLUSION AND FUTURE TRENDS
CONCLUSION AND FUTURE TRENDSThis chapter has looked at the development and use of vacuum pumps and exhaust gas abatement systems to support processes for manufacturing cutting-edge semiconductor devices, flat panel displays, and LEDs, citing numerous practical examples and applications.A concept that has been developed and deployed over the last decade or so has been to close-couple vacuum pumps and gas abatement systems in a single, compact, extracted enclosure with common control and utilities systems, usually referred to as an "integrated system." The original motivation for doing so was safety, especially when using highly toxic gases like arsine and phosphine because any potential leaks would be contained, controlled and could be easily detected by moni…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CONCLUSION AND FUTURE TRENDS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export