POINT-OF-USE ABATEMENT


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POINT-OF-USE ABATEMENT
POINT-OF-USE ABATEMENT
Abatement Basics In the early days of the semiconductor industry, there was an adage that "the solution to pollution is dilution," that is, you could simply dilute any exhaust gas in a high air flow and the problem would "go away." Fortunately, this has long been recognized not to be true, and that such an approach simply results in dilute pollutants in the atmosphere. Indeed, many of today's precursor gases are so toxic or reactive that this approach would be dangerous in the extreme, and some greenhouse gases (GHGs) like CF4 have a 100-year global warming potential (GWP) 7390 times that of CO2, and an atmospheric half-life of 50,000 years.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. POINT-OF-USE ABATEMENT, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export