INTRODUCTION


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INTRODUCTION
INTRODUCTIONVacuum pumps and point-of-use (PoU) gas abatement systems can be thought of as life-support systems for wafer processing tools, providing the reduced pressures required to satisfy the needs of the process recipe and subsequently treating the reagent and by-product gases, respectively. This chapter considers the challenges that pumps and abatement systems have to meet and the technological approaches that have been developed to satisfy these requirements, with commentary on their strengths and weaknesses, citing representative examples. The latest trends in combining vacuum pumps and PoU abatement systems into a single, fully integrated system are also covered.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. INTRODUCTION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export