CONCLUSIONS


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CONCLUSIONS
CONCLUSIONSReduction of product defects to the levels acceptable in world-class cleanroom manufacturing requires continual attention to static charge control. Uncontrolled, static charge is responsible for increasing the number of particle-related defects, for damaging products and equipment with ESD, and for interfering with factory automation. As factory profitability increasingly depends on both high yields and high product throughput, solving static-related problems in cleanrooms has become a necessity.Static charge control starts with the grounding of personnel, equipment, and any materials that come close to static-sensitive products. Insulating materials should be removed whenever possible and replaced with static dissipative equivalents. When insulators must be used …
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CONCLUSIONS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export