AIR IONIZER APPLICATIONS


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AIR IONIZER APPLICATIONS
AIR IONIZER APPLICATIONS
Common Applications Static charge can cause problems anywhere in the cleanroom environment. To control these problems ionizers are used in a variety of configurations. Applications can involve cleanrooms that operate in the ISO class 4 to ISO class 5 range and are typical of the BEOL. In contrast, front-end cleanrooms are most often characterized by high levels of automation and typically require cleanliness levels in the ISO class 3 or higher realms. These two scenarios require very different ionization solutions. Each of these situations is discussed below. The most common method used in ISO class 3 ballroom-style cleanrooms is room air ionization. Such io…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. AIR IONIZER APPLICATIONS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export