ELECTROSTATIC MEASUREMENT


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ELECTROSTATIC MEASUREMENT
ELECTROSTATIC MEASUREMENT
Measuring Electric Field The presence of electrostatic charge is indicated by an electric field. For that reason, identifying the presence of an electric field is an important diagnostic technique in dealing with static charge. An electrostatic field meter is the tool that is used for measuring the electric field at a surface. Presence of a field implies presence of electrostatic charge. The field meter is calibrated in units of volts/length and typically quoted in kV/in for historical reasons. The field meter measures the field at a distance of 1 in from the object. To operate it accurately, it is necessary to ensure that it has a ground reference. This i…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ELECTROSTATIC MEASUREMENT, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export